EDS-Lite, Quantitative Energy Dispersive Spectroscopy of Light Elements

Is scanning electron microscopy/energy dispersive X-ray spectrometry (SEM/EDS) quantitative?

Scanning electron microscopy/energy dispersive X-ray spectrometry (SEM/EDS) is a widely applied elemental microanalysis method capable of identifying and quantifying all elements in the periodic table except H, He, and Li. By following the "k-ratio" (unknown/standard) measurement protocol development for electron-excited wavelength dispersive spectrometry (WDS), SEM/EDS can achieve accuracy and...

Single-atom electron energy loss spectroscopy of light elements

Light elements such as alkali metal (lithium, sodium) or halogen (fluorine, chlorine) are present in various substances and indeed play significant roles in our life. Although atomic behaviours of these elements are often a key to resolve chemical or biological activities, they are hardly visible in transmission electron microscope because of their smaller scattering power and higher knock-on p...

Energy Dispersive X-Ray Spectroscopy for the Determination of Trace and Main Elements

The results from various samples reported here show that energy dispersive x-ray spectroscopy is available as an efficient analytical method; one that has emerged from the qualitative and semiquantitative overview analysis phase. Particularly the ability to improve sensitivity or reduce statistical error using optimized excitation has led to an important advancement in capturing the primary sig...

The Analysis of Particles at Low Accelerating Voltages (≤ 10 kV) With Energy Dispersive X-Ray Spectroscopy (EDS)

In recent years, there have been a series of advancements in electron beam instruments and x-ray detectors which may make it possible to improve significantly the quality of results from the quantitative electron-probe analysis of individual particles. These advances include: (1) field-emission gun electron beam instruments such as scanning electron microscopes (FEG-SEMs) that have high brightn...

Rotationally resolved energy - dispersive photoelectron spectroscopy of H 2 O :